Journal Title
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Publisher
Springer, Dordrecht
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Authors: A Ricard
Publish Date: 1990
Volume: , Issue: , Pages: 1-34
Abstract
The subject of this lecture concerns the production of active species in gas discharges for surface treatments In low pressure plasmas electron collisions are the main source of active species in the discharge volume After a brief description of glow discharge devices working with a continuous electric current dc radiofrequency RF and microwave supplies the physics of electron excitation is described active plasmas Application to rare gases He Ar and diatomic molecules N2 O2 is emphasized
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