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Title of Journal: Comput Mech

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Abbravation: Computational Mechanics

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Springer-Verlag

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DOI

10.1002/cber.18930260341

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1432-0924

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Analysis of Microelectromechanical Systems MEMS

Authors: Q X Wang Hua Li K Y Lam
Publish Date: 2006/05/19
Volume: 40, Issue: 1, Pages: 1-11
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Abstract

In this paper the characteristics of microelectromechanical systems MEMS devices are analyzed by a meshless method—point weighted leastsquares PWLS method In the present meshless method field nodes and collocation points are adopted The field nodes are used to construct the trial functions based on locally supported interpolation domains The collocation points that can be independent of the field nodes are adopted to evaluate the total residuals of the problem domain and its boundaries The leastsquares technique is used to obtain the solution of the problem by minimizing the functional of the summation of weighted residuals The present meshless method possesses some advantages compared with the conventional collocation methods eg it is very stable for both regularly or irregularly nodal distributions the displacement and derivative boundary conditions can be easily enforced and the final coefficient matrix is symmetric Several onedimensional and two dimensional MEMS devices that are governed by the nonlinear equations are studied by the present PWLS method The simulated results are compared with those obtained by other simulation approaches and experimental results It is shown that the PWLS method is very efficient and accurate for the analysis of MEMS devices


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  2. A first order method for the Cauchy problem for the Laplace equation using BEM
  3. Direct numerical simulation of the dynamics of sliding rough surfaces
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  9. Adaptive multi-analysis strategy for contact problems with friction
  10. The total and updated lagrangian formulations of state-based peridynamics
  11. A variational constitutive framework for the nonlinear viscoelastic response of a dielectric elastomer
  12. Coronary arterial dynamics computation with medical-image-based time-dependent anatomical models and element-based zero-stress state estimates
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  14. 3D fluid–structure-contact interaction based on a combined XFEM FSI and dual mortar contact approach
  15. Boundary element analysis of three-dimensional crack problems in two joined transversely isotropic solids
  16. Erratum to: Modeling a smooth elastic–inelastic transition with a strongly objective numerical integrator needing no iteration
  17. On coupling of reproducing kernel particle method and boundary element method
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