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Title of Journal: Russ Phys J

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Potential distribution in probe measurements of anisotropic semiconductor films

Authors: V. V. Filippov,

Publish Date: 2009/06/11
Volume: 52, Issue:1, Pages: 59-65
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The electric current distribution is studied for probe measurements performed on anisotropic wafers. The phenomena caused by anisotropy of conduction are explained using the laws of electrodynamics, which makes it possible to consider the results obtained to be physically general, independent of the nature of anisotropy of electrical conduction. The methods are proposed for determination of the components of specific electrical conductivity tensor in anisotropic films.



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