Authors: Guangwei Guo Guangze Tang Yajun Wang Xinxin Ma Yujiang Wang
Publish Date: 2009/10/23
Volume: 16, Issue: 5, Pages: 719-
Abstract
Co87Nb10Zr3 Co76Nb19Zr5 Co64Nb26Zr10 and Co64Nb16Zr20 amorphous films were deposited on noncrystalline glass substrates by DC unbalanced magnetron sputtering The compositions of amorphous films were tailored in the light of the individual deposition rate of Co Nb and Zr The amorphous films with the anticipated composition were prepared by means of cosputtering Co Nb and Zr targets simultaneously It is indicated that there is interaction among three targets during cosputtering The morphology and composition of the films were observed by SEM AFM and EDS The structure and magnetic property were measured by XRD and physical property measurement system PPMS The coercivity changes with the composition varying from 240 to 1 600 A/m After vacuum isothermal annealing at temperatures of 475 500 525 and 550 °C for 15 and 30 min respectively it is found that high Nb content is beneficial to improving thermal stability of amorphous films The crystallized films have the mean grain size of 2–19 nm
Keywords: