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Title of Journal: J Therm Spray Tech

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Abbravation: Journal of Thermal Spray Technology

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Springer US

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DOI

10.1002/eji.201445174

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ISSN

1544-1016

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Nonequilibrium Atmospheric Plasma Deposition

Authors: T Belmonte G Henrion T Gries
Publish Date: 2011/03/24
Volume: 20, Issue: 4, Pages: 744-
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Abstract

This study is a review of plasma enhanced chemical vapor deposition PECVD at atmospheric pressure Sources for coatings over large area are presented Millimetric torches and microplasmas are next studied for localized PECVD A specific attention is paid to the way power is dissipated and the consequences it has on the deposition rate and on quality of thin filmsThermally assisted deposition at atmospheric pressure has been studied intensively during the 1970s and 1980s where there was an urgent need to deposit episilicon Ref 17 Many basic works Ref 813 showed the importance of controlling the gas hydrodynamics whose complexity especially in terms of instability Ref 12 13 required strong numerical efforts to be accurately described by computational fluid dynamics Special efforts were also carried out to determine the reaction mechanisms at the origin of thin film deposition Ref 1416Resorting to nonequilibrium media like those commonly produced by plasma assistance offers several advantages among which one finds two important features first the possibility to deposit thin films down to room temperature Ref 17 second—and this aspect has recently been emphasized Ref 1821—the possibility to nanostructure surfaces by submitting a surface to extremely nonequilibrium media What is meant here by “extremely” nonequilibrium is a huge difference in the characteristic plasma temperatures and steep gradients in temperature and density This scope has been found out only recently likely because remote plasmas rather than direct plasma processes have been more specifically studied Ref 2226 The spatial separation between the discharge generation region and the deposition area thus reducing the possibility of bombardment of the growing film by plasma species provides a better control of the layer growth Ref 27 Generally the less stable compounds are introduced downstream from the discharge what simplifies considerably the chemical pathways leading to less interdependence of process parameters Ref 22


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Other Papers In This Journal:

  1. Characterization of Microplasma Sprayed Hydroxyapatite Coating
  2. Compositionally Graded Thermal Barrier Coating by Hybrid Thermal Spraying Route and its Non-isothermal Oxidation Behavior
  3. Identification of Desirable Precursor Properties for Solution Precursor Plasma Spray
  4. Thanks to Our Guest Editors and Reviewers for Their Critical Contributions in 2014
  5. In Situ Monitoring of Particle Consolidation During Low Pressure Cold Spray by Ultrasonic Techniques
  6. High-Temperature Exposure Studies of HVOF-Sprayed Cr 3 C 2 -25(NiCr)/(WC-Co) Coating
  7. Review of Thermal Spray Coating Applications in the Steel Industry: Part 1—Hardware in Steel Making to the Continuous Annealing Process
  8. Sealing HVOF Thermally Sprayed WC-CoCr Coatings by Sol-Gel Methods
  9. Atmospheric Plasma Spraying of High Melting Temperature Complex Perovskites for TBC Application
  10. Double Rare-Earth Oxides Co-doped Strontium Zirconate as a New Thermal Barrier Coating Material
  11. Microstructure and Properties of Porous Abradable Alumina Coatings Flame-Sprayed with Semi-molten Particles
  12. Influence of the Spray Angle on the Properties of HVOF Sprayed WC–Co Coatings Using (−10 + 2 μm) Fine Powders
  13. Study of the Antibacterial Behavior of Wire Arc Sprayed Copper Coatings
  14. Rapid and Continuous Deposition of Porous Nanocrystalline SnO 2 Coating with Interpenetrating Pores for Gas Sensor Applications
  15. Effect of Spray Particle Velocity on Cavitation Erosion Resistance Characteristics of HVOF and HVAF Processed 86WC-10Co4Cr Hydro Turbine Coatings
  16. Phase Composition and Microstructural Responses of Graded Mullite/YSZ Coatings Under Water Vapor Environments
  17. JTST Editorial Team Expands; Vardelle Named Lead Editor
  18. A One-Dimensional Flow Model with Adiabatic Friction for Rapid Estimation of Cold Spray Flow Conditions
  19. Fast Modeling of Phase Changes in a Particle Injected Within a d.c Plasma Jet
  20. High-Pressure Cold-Sprayed Ni and Ni-Cu Coatings: Improved Structures and Corrosion Properties
  21. Selected Patents Related to Thermal Spraying
  22. Electrical Properties of Thermally Sprayed Ni- and Ni20Cr-Based Resistors
  23. Selected Patents Related to Thermal Spraying
  24. Evaluation of Die-Soldering and Erosion Resistance of High Velocity Oxy-Fuel Sprayed MoB-Based Cermet Coatings
  25. Simulation of Effervescent Atomization and Nanoparticle Characteristics in Radio Frequency Suspension Plasma Spray
  26. Relationships Between Process Parameters, Microstructure, and Adhesion Strength of HVOF Sprayed IN718 Coatings
  27. HVOF Spraying of Fe-Based MMC Coatings with In Situ Formation of Hard Particles by Hot Isostatic Pressing
  28. Parameters Influencing the Photocatalytic Activity of Suspension-Sprayed TiO 2 Coatings
  29. Development and Characterization of B 4 C Reinforced Detonation-Sprayed Al Coatings
  30. Abrasive Wear Study of Rare Earth Modified Coatings by Statistical Method
  31. Acoustic Measurements in a Hexamethyldisiloxane-Loaded Low-Temperature Direct Barrier Discharge (DBD) Plasma Effluent: Nozzle Cleaning
  32. The Role of Substrate Surface Chemistry on Splat Formation During Plasma Spray Deposition by Experiments and Simulations
  33. Effect of Sealing Treatment on Corrosion Resistance of Plasma-Sprayed NiCrAl/Cr 2 O 3 -8 wt.%TiO 2 Coating
  34. Journal of Thermal Spray Technology Volume 20 Best Paper Awards
  35. Internal Diameter HVAF Spraying for Wear and Corrosion Applications
  36. Journal of Thermal Spray Technology Volume 20 Best Paper Awards
  37. Preparation of Lanthanum Zirconate Coatings by the Solution Precursor Plasma Spray
  38. Chemical Vapor Deposition and Atomic Layer Deposition of Coatings for Mechanical Applications

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