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Title of Journal: Optoelectron Lett

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Abbravation: Optoelectronics Letters

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Tianjin University of Technology

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DOI

10.1016/j.annder.2013.01.355

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1993-5013

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Development of threedimensional profiler for larg

Authors: Hongxia Zhang Yimo Zhang Wencai Jing Dagong Jia Cen Huang
Publish Date: 2009/08/12
Volume: 5, Issue: 4, Pages: 292-294
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Abstract

This paper presents a large field phaseshifting interference microscope for microsurface topography measurement A PZT is used as the Zdirectional phase shifter The interference microscope is the combination of the infinity tube microscope with the Mirau twobeam interferometer Twodimensional precision motorized stage is aligned as the scanning system in the X and Ydirection to extend the test surface measurement range to 125 mm × 125 mm The minimum displacement is 0039 m and the overlapped proportion is 022 A fast stitching algorithm is proposed based on grid matching According to the reflectivity of the core and the ferrule the plate with the transmission/reflectivity ratio of 70/30 is selected to balance the interference intensity The instrument is proved to be valid by actual measurement of the end surface of an optical fiber connector

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