Authors: Dongwen Peng Jinrong Cheng Zhongyan Meng
Publish Date: 2007/09/13
Volume: 21, Issue: 1-4, Pages: 668-671
Abstract
Ba06Sr04Ti1+yO3 BST y = 01 015 02 025 03 thin films were fabricated on Ptcoated silicon substrates by modified solgel techniques It was found that the tunability of BST thin films and dissipation factor decreased with the increase of Ti content The multilayer structure of Ba06Sr04Ti1+yO3200 nm/Ba06Sr04TiO3100 nm/Ba06Sr04Ti1+yO3 200 nm y = 01 02 025 was designed to enhance the tunability Our results indicated that the modified composition and multilayer structure were beneficial to lowering the dielectric dissipation and enhancing the tunability simultaneously The tunability of 267 and dielectric dissipation of 0013 were achieved for modified BST thin filmsWe are pleased to acknowledge support from National Nature Science Foundation of China under Grant No 50332030 Shanghai Rising Star Program under Grant No 04qmx1440 and the key subject construction project Material Science of Shanghai Educational Committee
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