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Title of Journal: J of Materi Eng and Perform

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Abbravation: Journal of Materials Engineering and Performance

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Springer US

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DOI

10.1007/s00256-014-1951-1

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1544-1024

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Ti/TiSiNO Multilayers Fabricated by Cosputtering

Authors: L García González J Hernández Torres Ma G Garnica Romo L Zamora Peredo A M Courrech Arias E León Sarabia F J Espinoza Beltrán
Publish Date: 2013/03/19
Volume: 22, Issue: 8, Pages: 2377-2381
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Abstract

Multilayer coatings of titanium/ titanium silicon oxynitride Ti/TiSiNO were fabricated on stainless steel 434L substrates by sputtering technique using Ti and TiSiO targets The multilayers were formed by alternately and simultaneously introducing and suspending a 4sccm flow of nitrogen together with an interchange of targets during different time periods of 10 20 30 and 40 min thus we obtained intervals of different thickness by alternating the target Ti and using only argon and later with both targets Ti + TiSiO and the two gases Ar + N2 The final thickness was within a range of 0408 μm depending on the number of multi layers obtained by means of glow discharge optical emission spectroscopy The structure topography color durability and nanofriction were analyzed in accordance with the growth parameters used It was found that the values of hardness depend on the number of layers deposited The greatest number of layers 48 of them was obtained with a time period of 1 min thereby attaining the maximum value of hardness and the minimum value for both the friction coefficient and the RMS with 31 GPa 742 × 10−3 and 017 nm respectively The phases found correspond to Ti2N Si3N4 rutile phase of TiO2 and Ti The TiO2 phase was corroborated with Raman dispersion spectroscopy The color of the coatings was affected by variation in the working pressure which varied because of the internal process of reactive sputteringThis study was supported by the Fondo Mixto Consejo Nacional de Ciencia y TecnologíaGobierno del Estado de Veracruz de Ignacio de la Llave through project 127966 as well as the Dirección General de Investigaciones de la Universidad Veracruzana The authors gratefully acknowledge the assistances received from Francisco Rodríguez Melgarejo of the Centro de Investigación and Estudios Avanzados Unidad Querétaro and from Dr Ángel Luis Rodríguez Morales of the Center of Applied Physics and Advanced Technology Department of Molecular Engineering of Materials Shock Waves Laboratory


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