Authors: V A Vasiliev P S Chernov
Publish Date: 2013/03/24
Volume: 55, Issue: 12, Pages: 1350-1355
Abstract
Thinfilm nano and microelectromechanical systems of pressure transducers experimental and theoretical research methods and the results of estimation of the parameters of the morphology of the surfaces of films are considered A model and algorithm for the description of the growth of thin films that takes diffusion into account are developed
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