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Title of Journal: Meccanica

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Abbravation: Meccanica

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Springer Netherlands

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DOI

10.1002/humu.21352

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ISSN

1572-9648

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Novel optoelectronic laser interferometric microsc

Authors: Ryszard J Pryputniewicz
Publish Date: 2014/08/20
Volume: 50, Issue: 2, Pages: 533-540
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Abstract

Advances in emerging technology of microelectromechanical systems aka microsystems are one of the most challenging tasks in today’s experimental mechanics More specifically development of these miniature devices requires sophisticated design analysis fabrication testing and characterization tools that have multiphysics and multiscale capabilities especially as microsystems are being developed for use at harsh conditions In harshenvironment and highperformance military guidance applications inertial sensors must be sensitive to low rates of rotation yet survive the high blast loads associated with the initial launch In this multiyear study a set of tuning fork gyroscopes were subjected to a series of increasing gloads culminating at approximately 60000 g’s with measurements of shape made after each test A custom set of test sample packages aka articles were hermetically sealed with glass lids to allow optical inspection of components while preserving the operating environment Initial test measurements were made upon fabrication of the articles Optical and interferometric measurements have been made prior to and after each shock gloading The shape of the tuning fork gyroscope test articles was measured using optoelectronic laser interferometric microscope methodology Full field shape was determined and traces of pertinent structures were extracted for comparison Failure of the die was observed in the form of fractures below the chip surface as well as fractures in the glass lid sealing the package Potential causes of the failure are discussed as well as a recommendation for modified packaging techniques to mitigate future component failuresThe author gratefully acknowledges support by various project sponsors and thanks them for permission to include results of their programs in this paper Contributions by various members of CHSLT are also acknowledged and very appreciated This study was partially supported by the NEST program at WPI


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