Authors: Carl Lawrence Aronson Douglas Beloskur Isaac S Frampton Justin McKie Paul Montbriand
Publish Date: 2004/10/29
Volume: 52, Issue: 6, Pages: 409-419
Abstract
Functionalization of both linear poly4hydroxystyrene PHS and branched poly4hydroxystyrene PHSB was accomplished via a ReimerTiemann electrophilic aromatic substitution reaction Linear and branched poly4hydroxystyreneco5vinylsalicylaldehyde pHS/5VSA and pHSB/5VSA copolymers were observed to undergo acidcatalyzed novolac type selfcrosslinking Both the pHS/5VSA and pHSB/5VSA copolymer systems possessed a lower deep ultra violet microlithographic sensitivity compared to linear PHS when formulated in negative photoresists The sluggishness of the negative photoresists containing 5vinylsalicylaldehyde functionalized copolymers was attributed to a combination of resonance stabilization and steric hindrance effects
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