Authors: Hong Wen Chen
Publish Date: 2007/03/13
Volume: 78, Issue: 1, Pages: 5-9
Abstract
The semiconductor manufacturing industry is a chemicallyintensive modern industry in which workers are potentially exposed to toxic metals of the IIIA IVA and VA families including gallium Ga indium In and arsenic As Liao et al 2006 Chen 2006 These metals or metalloids are known to have several toxicities and to cause carcinogenesis in animals and humans Chepesiuk 1999 Fowler et al 1993 Symptoms of acute poisoning including gastrointestinal discomfort vomiting coma and sometimes death usually occur within 30 min of ingestion of GaAs and InAs whereas the consequences of chronic poisoning including anemia leucopenia skin cancer and other internal cancers are much more insidious Betoulle et al 2002 A single dose of 100 mg/kg of GaAs and InAs resulted in acute pulmonary inflammation and pneumocyte hyperplasia after 14 days Betoulle et al 2002 Tanaka et al 1996 Webb et al 1986 Chronic exposure 2year observation period to lower doses
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