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Title of Journal: Nonlinear Dyn

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Abbravation: Nonlinear Dynamics

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Springer Netherlands

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1573-269X

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Dynamics of a closeloop controlled MEMS resonator

Authors: Abdulrahman Seleim Shahrzad Towfighian Emmanuel Delande Eihab AbdelRahman Glenn Heppler
Publish Date: 2011/12/24
Volume: 69, Issue: 1-2, Pages: 615-633
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Abstract

The dynamics of a closeloop electrostatic MEMS resonator proposed as a platform for ultra sensitive mass sensors is investigated The parameter space of the resonator actuation voltage is investigated to determine the optimal operating regions Bifurcation diagrams of the resonator response are obtained at five different actuation voltage levels The resonator exhibits bistability with two coexisting stable equilibrium points located inside a lower and an upper potential wells Steadystate chaotic attractors develop inside each of the potential wells and around both wells The optimal region in the parameter space for mass sensing purposes is determined In that region steadystate chaotic attractors develop and spend most of the time in the safe lower well while occasionally visiting the upper well The robustness of the chaotic attractors in that region is demonstrated by studying their basins of attraction Further regions of large dynamic amplification are also identified in the parameter space In these regions the resonator can be used as an efficient longstroke actuator

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