Authors: J Li X H Sheng
Publish Date: 2009/11/25
Volume: 32, Issue: 5, Pages: 481-
Abstract
Silane coupling reagent 3mercaptopropyl trimethoxysilane MPTS was used to prepare twodimensional selfassembled monolayer SAM on silicon substrate The terminal SH group was in situ oxidized to −SO3H group to endow the film with good chemisorption ability Then TiO2 thin films were deposited on the oxidized MPTSSAM to form composite thin films making use of the chemisorption ability of the −SO3H group Atomic force microscope AFM and contact angle measurements were used to characterize TiO2 films Adhesive force and friction force of TiO2 thin films and silicon substrate were measured under various applied normal loads and scanning speed of AFM tip Results showed that the friction force increased with applied normal loads and scanning speed of AFM tip In order to study the effect of capillary force tests were performed in various relative humidities Results showed that the adhesive force of silicon substrate increases with relative humidities and the adhesive force of TiO2 thin films only increases slightly with relative humidity Research showed that surfaces with more hydrophobic property revealed the lower adhesive and friction forces
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