Paper Search Console

Home Search Page About Contact

Journal Title

Title of Journal: J Mech Sci Technol

Search In Journal Title:

Abbravation: Journal of Mechanical Science and Technology

Search In Journal Abbravation:

Publisher

Korean Society of Mechanical Engineers

Search In Publisher:

DOI

10.1007/bf01430377

Search In DOI:

ISSN

1976-3824

Search In ISSN:
Search In Title Of Papers:

Nano positioning control for dual stage using mini

Authors: Hong Gun Kim
Publish Date: 2012/03/29
Volume: 26, Issue: 3, Pages: 941-947
PDF Link

Abstract

A nano positioning control is developed using the ultraprecision positioning apparatus such as actuator sensor guide power transmission element with an appropriate control method Using established procedures a single plane XY stage with ultraprecision positioning is manufactured A global stage for materialization with robust system is combined by using an AC servo motor with a ball screw and rolling guide An ultraprecision positioning system is developed using a micro stage with an elastic hinge and piezo element Global and micro servos for positioning with nanometer accuracy are controlled simultaneously using an incremental encoder and a laser interferometer to measure displacement Using established procedures an ultraprecision positioning system 100 mm stroke and ±10 nm positioning accuracy with a single plane XY stage is fabricated Its performance is evaluated through simulation using Matlab After analyzing previous control algorithms and adapting modern control theory a dual servo algorithm is developed for a minimum order observer to secure the stability and priority on the controller The simulations and experiments on the ultra precision positioning and the stability of the ultraprecision positioning system with single plane XY stage and the priority of the control algorithm are secured by using Matlab with Simulink and ControlDesk made in dSPACEHong Gun Kim received a BS and MS degree in Mechanical Engineering from Hanyang University in 1979 and 1985 Dr Kim then went on to receive his PhD degrees from University of Massachusetts in 1992 Dr Kim is currently the Professor at the Department of Mechanical Automotive Engineering at Jeonju University in Jeonju Korea He is currently serving as an Editor of the J of KSMTE Dr Kim’s research interests are in the areas of mechanical design production engineering and composite engineering

Keywords:

References

.
Search In Abstract Of Papers:
Other Papers In This Journal:
  1. Review of the finite element models for a structural integrity evaluation of the sodium-cooled fast reactor high temperature piping
  2. Experimental and numerical assessment of the improvement of the load-carrying capacities of butterfly-shaped coupling components in composite structures
  3. Research on a new type of squirt gun for cleaning
  4. Closed loop control of the planar flexible manipulator via Youla-Kucera parameterization
  5. Optimal combination of design parameters for improving the kinematics characteristics of a midsize truck through design of experiment
  6. A numerical prediction on the reduction of microorganisms with UV disinfection
  7. Effects of microstructure on material properties of modified 9Cr-1Mo steel subject to creep-fatigue
  8. In-pipe micromachine locomotion via the inertial stepping principle
  9. Optimal disc cutters plane layout design of the full-face rock tunnel boring machine (tbm) based on a multi-objective genetic algorithm
  10. Model reduction of a multibody system including a very flexible beam element
  11. Choosing a suitable sample size in descriptive sampling
  12. Examination and modification of equivalent delamination factor for assessment of high speed drilling
  13. Prediction of cutting force, tool wear and surface roughness of Al6061/SiC composite for end milling operations using RSM
  14. Prediction of cutting force, tool wear and surface roughness of Al6061/SiC composite for end milling operations using RSM
  15. Nonlocal beam models for buckling of nanobeams using state-space method regarding different boundary conditions
  16. Effect of leading edge boundary layer thickness on dimple flow structure and separation control
  17. Flow instability due to cryogenic cavitation in the downstream of orifice
  18. A two-dimensional simulation model for the molded underfill process in flip chip packaging
  19. A study on the microstructural property and thermal property of Ti-alloys without Al as biomaterials
  20. The development of a quality prediction system for aluminum laser welding to measure plasma intensity using photodiodes
  21. Explicit formulation for natural frequencies of double-beam system with arbitrary boundary conditions
  22. Induced nonlocal electric wave propagation of boron nitride nanotubes
  23. Stochastic analysis of a collection process of submicron particles on a single fiber accounting for the changes in flow field due to particle collection
  24. Comparison of different power generators in PV-battery-power generator hybrid system
  25. Welding residual stress analysis of 347H austenitic stainless steel boiler tubes using experimental and numerical approaches
  26. Self-learning navigation algorithm for vision-based mobile robots using machine learning algorithms
  27. Optimal design of spaced plates under hypervelocity impact
  28. Experimental study on ECM with a grid cathode composed of circular cells
  29. Application of grey model for machine degradation prognostics
  30. Methodology for corrosion evaluation in HAZ of 11%-Cr ferritic stainless steel
  31. Thermodynamic second law analysis for a gravity-driven variable viscosity liquid film along an inclined heated plate with convective cooling
  32. Determination of the flow stress and thermal properties of ceramic powder feedstock in ceramic injection molding
  33. Surface durability of powder-forged roller treated by shot peening
  34. Effects of gas and particle emissions on wall radiative heat flux in oxy-fuel combustion
  35. Investigation on dynamic responses of dual-axis positioning mechanism for satellite antenna considering joint clearance
  36. A parametric study of the confined spraying distance, solution concentration, and spraying time for the spraying technique used to fabricate PS superhydrophobic surfaces
  37. Effect of type and percentage of reinforcement for optimization of the cutting force in turning of Aluminium matrix nanocomposites using response surface methodologies
  38. Finite element simulation and experiments on a new induction heating bearing replacer
  39. Multi-pass laser welding of thick plate with filler wire by using a narrow gap joint configuration
  40. Jet flow characteristics of sinusoidal wavy nozzles
  41. Vibration characteristics of computer stacked disks and head assembly
  42. Revisiting the free transverse vibration of embedded single-layer graphene sheets acted upon by an in-plane magnetic field
  43. Configuration design of ten-speed automatic transmissions with twelve-link three-DOF Lepelletier gear mechanism
  44. Effect of micro-scale Young’s modulus and surface roughness on adhesion property to plasma-treated rubber surface
  45. A finite element beam analysis by interface matching
  46. Delayed detached-eddy simulation of vortex breakdown over a 70° delta wing
  47. Effect of working-fluid filling ratio and cooling-water flow rate on the performance of solar collector with closed-loop oscillating heat pipe
  48. Prediction of thermoacoustic instability in Rijke tube using CFD-CAA numerical method
  49. Application of cepstrum and neural network to bearing fault detection
  50. Stochastic finite element modeling and response analysis of rotor systems with random properties under random loads
  51. Experimental analysis of emission reduction by the split injection strategy using close post injection with a double-row nozzle in heavy EGR conditions
  52. Effects of nearfield waves and phase information on the vibration analysis of curved beams
  53. Nonlinear behavior of capacitive micro-beams based on strain gradient theory
  54. Identifying a simplified model for heavy duty gas turbine
  55. Predictive carbon nanotube models using the eigenvector dimension reduction (EDR) method
  56. Enhanced tubing thermal performance for innovative MSF system
  57. Development of an automatic vegetable bundling machine using thermal bonding
  58. Order reduction in time integration caused by velocity projection
  59. A formula for the crack opening level under random loading in 2024-T351 aluminum alloy
  60. Numerical evaluation of the coefficients of thermal expansion of fibers in composite materials using a lamina-scale cost function with quasi-analytical gradients
  61. Nondestructive testing and crack evaluation of ferromagnetic material by using the linearly integrated hall sensor array
  62. Experiments of optimal delay extraction algorithm using adaptive time-delay filter for improved vibration suppression
  63. Crack identification in a rotor with an open crack
  64. Three-dimensional flow simulation of transient power interruption process of a prototype pump-turbine at pump mode
  65. Spray development process of aviation fuel using a low-pressure fuel injector: Visualization and analysis
  66. Simulating dynamics, durability and noise emission of wind turbines in a single CAE environment
  67. Optimization of weld characteristics of friction welded AA 6061-AA 6351 joints using grey-principal component analysis (G-PCA)
  68. Optimization of weld characteristics of friction welded AA 6061-AA 6351 joints using grey-principal component analysis (G-PCA)
  69. Passive acoustic radiation control for a vibrating panel with piezoelectric shunt damping circuit using particle swarm optimization algorithm
  70. An investigation into the anti-releasing performance of a serrated bolt
  71. Mechanical properties of graphite/aluminum metal matrix composite joints by friction stir spot welding
  72. High-accuracy servo press system for the clinching joint process
  73. Optimization of welding current waveform for dissimilar material with DP590 and Al5052 by Delta-spot welding process
  74. Application of the differential transformation method and variational iteration method to large deformation of cantilever beams under point load
  75. Analysis of performance deterioration of a micro gas turbine and the use of neural network for predicting deteriorated component characteristics
  76. A comparative study of the ignition and burning characteristics of afterburning aluminum and magnesium particles
  77. Optimization of semi-solid metal processing of A356 aluminum alloy
  78. Combined analytical and numerical solution for an elastically supported Timoshenko beam to a moving load
  79. Destabilization of the shear layer in the post chamber of a hybrid rocket
  80. Failure assessment diagram analysis of high density polyethylene pipes
  81. Phase doppler measurements: system set-up optimization for characterization of a diesel nozzle
  82. Measurements of the flow fields around two square cylinders in a tandem arrangement
  83. Multidisciplinary optimization of a stiffened shell by genetic algorithm
  84. Fault feature extraction of a rotor system based on local mean decomposition and Teager energy kurtosis
  85. Theoretical investigations on the effect of system parameters in series hydraulic hybrid system with hydrostatic regenerative braking
  86. Design and fabrication of custom-made dental implants
  87. Gearbox health condition identification by neuro-fuzzy ensemble
  88. Compressive characteristics of WBK core depending upon the specimen size
  89. Predicting the impact of vegetations in open channels with different distributaries’ operations on water surface profile using artificial neural networks
  90. Optimization of a reversed trapezoidal fin using a 2-D analytic method
  91. Simulation results of a hexahedron-octahedron based spherical stepping motor
  92. Influence of unsupported and partially supported sleepers on dynamic responses of train–track interaction
  93. Total emissivity of CO 2 near earth atmospheric condition
  94. A fluid-structure interaction analysis on hemodynamics in carotid artery based on patient-specific clinical data
Search Result: