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Title of Journal: Int J Adv Manuf Technol

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Abbravation: The International Journal of Advanced Manufacturing Technology

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Springer-Verlag

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1433-3015

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Research on AOCTPNbased modeling and simulation t

Authors: Zhai Wenbin Chu Xuening Zhang Jie Ma Dengzhe Jin Ye Yan Juanqi
Publish Date: 2005/06/29
Volume: 28, Issue: 7-8, Pages: 814-821
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Abstract

There was a lack of modeling technology for the line fabrication of semiconductors under multiagentbased scheduling and control status in quo To resolve this problem an AOCTPN modeling technology for a semiconductor fabrication line was proposed The interior behavior of the machine agent was encapsulated and the hierarchical multiagentbased semiconductor fabrication line model was separated into the system layer the machine group layer and the machine agent layer which reduced the complexity and improved the reuse of the model In addition a distributed discrete event simulation platform was built to evaluate the performance of the multiagentbased semiconductor fabrication line An illustrative example of a 6inch semiconductor fabrication line in Shanghai demonstrates the effectiveness of this approach

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