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Title of Journal: Int J Adv Manuf Technol

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Abbravation: The International Journal of Advanced Manufacturing Technology

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Springer-Verlag

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DOI

10.1016/0035-9203(80)90006-1

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1433-3015

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A multistage fluctuation smoothing method for mul

Authors: Hongtao Hu Lu Zhen Zhuo Sun Huai Zhang
Publish Date: 2013/01/26
Volume: 67, Issue: 1-4, Pages: 111-120
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Abstract

The performance of a wafer fabrication system is constrained by its bottlenecks which is often affected by the system fluctuations and unpredicted events eg machine breakdown Considering the reentrant process flow in wafer fabrication we propose a scheduling method that divides the process flow into several stages and protects the bottleneck step at each reentrant stage from the system fluctuations Furthermore due to the multiple bottlenecks in wafer fabrication system we identify the bottlenecks by sensitivity analysis on machines’ capacity Then during the realtime scheduling the bottlenecks with stronger constraints are assigned with higher priority than the bottlenecks with weaker constraints Finally a set of simulation experiments are performed to validate the effectiveness of the proposed method

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