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Title of Journal: Int J Adv Manuf Technol

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Abbravation: The International Journal of Advanced Manufacturing Technology

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Springer London

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DOI

10.1007/bf02832208

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1433-3015

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Electrochemical micromachining of small tapered mi

Authors: Yufeng Wang Yongbin Zeng Ningsong Qu Di Zhu
Publish Date: 2015/09/04
Volume: 84, Issue: 5-8, Pages: 851-859
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Abstract

A submicro spherical tool electrode is introduced for electrochemical micromachining EMM which could reduce the taper angle of the processed microstructures An experimental setup that includes macro stages and piezo nanopositioning actuators is developed for EMM The submicro spherical tool is prepared by liquid membrane pulsed electrochemical machining The stability of the EMM process is inprocess monitored by acquiring both the voltage and current signals The machining depth achieved with the submicro spherical tool is 139  of that achieved with a sharp conical tool It is also indicated that the machining stability could also be improved with the spherical tool Experimental results reveal that a low pulse voltage level small pulse duration and low electrolyte concentration decrease the machining side gap Small tapered microstructures such as microcube of 30 × 30 × 035 μm in size and microfluidic channels with varying widths are manufactured by EMM

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