Authors: ChenChing Ting TaiFa Young ChingSong Jwo
Publish Date: 2006/08/30
Volume: 34, Issue: 3-4, Pages: 316-322
Abstract
This article presents a manufacturing process for diamond nanopowder by using a microwave plasma torch technique in a laboratory at near atmospheric pressure The unique technique utilized in the arrangement is the hybrid plasma torch which was patented in 1997 by Dr ChengMing Wu in Taiwan It has the advantage of working at near atmospheric pressure and does not require an extreme vacuum system which is a necessary condition for fabrication of a large amount of nanoparticles The applied constituents of gas mixtures for synthesizing diamond nanopowder in the process are CH4 with AR and CH4 with N2 where AR and N2 serve as catalysts In processing the reaction chamber it is first pumped to varied pressures from 40–300 Torr to induce plasma then the input reactive gas CH4 is fixed at a constant flow rate of 06 l/min and mixed up with varied input flow rate of the catalysts Ar and N2 from 06–12 l/min The particle size of synthesized diamond nanopowder is within about 2550 nm diameter which mainly depends on flow rate of CH4AR and CH4N2
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