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Title of Journal: Chin Sci Bull

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Abbravation: Chinese Science Bulletin

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SP Science in China Press

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DOI

10.1016/0305-0483(75)90124-3

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1861-9541

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Numerical studies on flow and thermal fields in MO

Authors: ShuQuan Zhong XiaoMin Ren YongQing Huang Qi Wang Hui Huang
Publish Date: 2010/02/16
Volume: 55, Issue: 6, Pages: 560-566
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Abstract

A systematic study has been performed to investigate the flow and thermal patterns of vertical rotating Thomas Swan MOCVD reactor at low pressure using 2D dynamic modeling By varying and calculating the several important process parameters of the reactor the optimized conditions of the uniform distributions of velocity and temperature profiles in steady state have been obtained Then timedependent models with the step response perturbation of the total gas rate can help identify the visual transient behavior inside the reactor and analyze the mechanism of delay time relaxation oscillation and pulsative oscillation These results are beneficial to the process parameter optimization and geometrical configuration design of the MOCVD reactorThis work was supported by the National Basic Research Program of China Grant No 2003CB314901 National Natural Science Foundation of China Grant Nos 10875018 10773002 and 60576018 National High Technology Research and Development Program of China Grant Nos 2006AA03Z416 and 2007AA03Z418 111 Project Grant No B07005 and Program for Changjiang Scholars and Innovative Research Team in University Grant No IRT0609

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