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Title of Journal: Microsyst Technol

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Abbravation: Microsystem Technologies

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Springer-Verlag

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DOI

10.1016/0022-3913(82)90315-8

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1432-1858

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Metallic micro displacement capacitive sensor fabr

Authors: Yongjun Lai Evgueni V Bordatchev Suwas K Nikumb
Publish Date: 2006/04/04
Volume: 12, Issue: 8, Pages: 778-
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Abstract

This paper presents design fabrication and performance testing results of the micro displacement capacitive microsensor fabricated by femtosecond laser machining technology The microsensor having overall dimensions of 1275 W×1153 L μm consisted of 20 pairs of comb fingers of 24 W×300 L μm with a gap between the fingers of 6 μm suspension springs inertial mass and support anchors The sensor structure was fabricated from a 25 μm thick tungsten foil The fabricated microsensor was able to deliver 230 fF capacitance variations for measured displacements up to 25 μm The results on the performance testing and geometry evaluation under pins the laser micromachining technology as an effective tool to fabricate miniature functional components and mechanisms The developed microsensor can be used for micro/nano scale displacement measurements in MEMS applicationsThe authors are grateful to MahmudUl Islam Director Production Technology Research IMTI for his continued support in this work Also thanks are due to their colleagues Matthew Hsu Hugo Reshef and Craig Dinkel for their help in performing the laser micromachining and packaging work This study was funded by NRC Canada—NSC Taiwan Collaborative Research Program

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