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Title of Journal: Microsyst Technol

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Abbravation: Microsystem Technologies

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Springer-Verlag

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DOI

10.1007/bf02492465

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1432-1858

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RFMEMS switch actuation pulse optimization using

Authors: M Spasos K Tsiakmakis N Charalampidis R Nilavalan
Publish Date: 2011/06/17
Volume: 17, Issue: 8, Pages: 1351-1359
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Abstract

Reliability and longevity comprise two of the most important concerns when designing microelectromechanicalsystems MEMS switches Forcing the switch to perform close to its operating limits underlies a tradeoff between response bandwidth and fatigue life due to the impact force of the cantilever touching its corresponding contact point This paper presents for first time an actuation pulse optimization technique based on Taguchi’s optimization method to optimize the shape of the actuation pulse of an ohmic RFMEMS switch in order to achieve better control and switching conditions Simulation results show significant reduction in impact velocity which results in less than 5 times impact force than nominal step pulse conditions and settling time maintaining good switching speed for the pull down phase and almost elimination of the high bouncing phenomena during the release phase of the switch

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