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Title of Journal: Microsyst Technol

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Abbravation: Microsystem Technologies

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Springer Berlin Heidelberg

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DOI

10.1007/bf00883662

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ISSN

1432-1858

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Laser moulding a new lowcost fabrication process

Authors: Markus Wissmann Heino Besser Markus Beiser Wilhelm Pfleging
Publish Date: 2014/06/03
Volume: 21, Issue: 7, Pages: 1543-1549
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Abstract

Laser moulding is a new polymer moulding process developed and enhanced for the fabrication of micro and nanostructured components at the Karlsruhe Institute of Technology This report describes the potential offering by laser moulding Besides known polymer moulding techniques like injection moulding or hot embossing laser moulding can also achieve significant advantages compared to the existing technologies Assisted by a high power diode laser radiation wavelength 940 nm a micro or nanostructure of a mould will be transferred to a thermoplastic polymer product With regard to the efficiency of production micro and nanostructures should be fast competitive and flexibly transferred to a thermoplastic polymer surface For this purpose the moulding by laser radiation provides ideal conditions advantages and a variety of applications These conditions advantages and applications were tested by using different micro or nanostructured mould inserts made of silicon glass or nickel as well as different thermoplastic polymers which were used for replication such as polymethylmethacrylate polystyrene cycloolefin copolymers and polyether ketones The new technical approach and his first results will be described in this report

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  2. Micro liquid rotor operated by surface-acoustic-wave
  3. Robust embedding of longitudinal position into tape servo signals
  4. Analysis of PDT noise originating from driving method of a HDD spindle motor
  5. Auto-focusing actuator and camera module including flexible diaphragm for mobile phone camera and wireless capsule endoscope
  6. Novel heat dissipation design for light emitting diode applications
  7. Hot embossing of thermoplastic multilayered stacks
  8. Piezoelectric in-plane microplate resonators based on contour and flexure-actuated modes
  9. A review of fabrication processes for vertical comb drives
  10. Reliability of Pt ohmic contact on an undoped 3C-SiC micro-electrothermal device
  11. Design and fabrication of a square shape bulk mode MEMS resonators
  12. Computational fluid dynamics for effects of coolants on on-chip cooling capability with carbon nanotube micro-fin architectures
  13. Cells adhered and cultured on microcantilevers
  14. Elicitation of a reference process model for tool-based micro technologies for planning and controlling purposes and user support
  15. LTO cartridge reel deflection under tape packing stresses
  16. In-situ fabrication of an out-of-plane microlens with pre-definable focal length
  17. Dynamic calibration method of inertial measurement units
  18. Two temperature theory of initially stressed electro-microstretch medium without energy dissipation
  19. Design of compact and wide bandwidth SPDT with anti-stiction torsional RF MEMS series capacitive switch
  20. Vibrational energy scavenging with Si technology electromagnetic inertial microgenerators
  21. Elastic coefficient analysis on planar S-shaped micro spring under high impact load
  22. Mechanical vibration and critical speeds of rotating composite laminate disks
  23. Enhanced electromigration reliability via Ag nanoparticles modified eutectic Sn–58Bi solder joint
  24. Precise measurement of angular position and speed of spindle motor during spin-up by computing differences in winding current rise time
  25. Motor noise generation and prediction for high spinning speed hard disk drive
  26. Study on the effect of heating plate thickness on the micro induction heater for thermal bubbles generation
  27. Analysis of electromagnetic interference of a capacitive RF MEMS switch during switching
  28. Ultra fine pitch flat panel display packaging using 3 μm conductive particles
  29. Fabrication of polystyrene microfluidic devices using a pulsed CO 2 laser system
  30. Enhanced efficiency of sorting sperm motility utilizing a microfluidic chip
  31. Bifurcation and chaos analysis of atomic force microscope system
  32. Analysis and testing of a contraction-and-expansion micromixer for micromilled microfluidics
  33. Shield-layers for reducing thermoelastic damping in resonating Silicon bars
  34. Multidimensional line dispensing of unfilled adhesives
  35. Multiple aspect-ratio structural integration in single crystal silicon (MASIS) for fabrication of transmissive MOEMS modulators
  36. Multiple aspect-ratio structural integration in single crystal silicon (MASIS) for fabrication of transmissive MOEMS modulators
  37. Vibration analysis of axially moving magnetic tape with comparisons to static and dynamic experimental results
  38. Flip chip packaging for MEMS microphones
  39. A chip scale nanofluidic pump using electrically controllable hydrophobicity
  40. MEMS switches controlled multi-split ring resonator as a tunable metamaterial component
  41. A study of acoustic noise generating mechanisms of small form factor HDDs
  42. Metallic micro displacement capacitive sensor fabricated by laser micromachining technology
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  44. Effects of geometric parameters for superhydrophobicity of polymer surfaces fabricated by precision tooling machines
  45. Modelling and evaluation of a thermal microfluidic sensor fabricated on plastic substrate
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  47. Micro injection molding of micro gear using nano-sized zirconia powder
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  49. Iterative design method for an image filter to improve the bit error rate in holographic data storage systems
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  51. Numerical investigation of slider dynamics induced by contacts with disk asperities
  52. Ellipsometric measurement accuracy of ultrathin lubricant thickness on magnetic head slider
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  55. Design, fabrication and testing of a high performance silicon piezoresistive Z-axis accelerometer with proof mass-edge-aligned-flexures
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  59. Fabrication of polymer micro-tip by optical lensing technique
  60. Fabrication of curved sub-micron Si structures by a combination of anisotropic etching using surfactant-added TMAH solution and FIB direct-drawn mask
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  62. Method for quick prediction of windage power loss
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  66. Embedding conductive patterns of elastomer nanocomposite with the assist of laser ablation
  67. A novel uncooled thermal imaging sensor using MEMS transistor
  68. Effect of suspension design on the non-operational shock response in a load/unload hard disk drive
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  70. RF-MEMS switch actuation pulse optimization using Taguchi’s method
  71. Linear and non-linear behavior of mechanical resonators for optimized inertial electromagnetic microgenerators
  72. Experimental study of slider–lubricant interaction with different slider designs
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