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Title of Journal: Microsyst Technol

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Abbravation: Microsystem Technologies

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Springer Berlin Heidelberg

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DOI

10.1007/s10346-015-0569-2

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ISSN

1432-1858

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Reliability characterization of a soot particle se

Authors: Radoslav Rusanov Holger Rank Tino Fuchs Roland MuellerFiedler Oliver Kraft
Publish Date: 2015/06/05
Volume: 22, Issue: 3, Pages: 481-493
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Abstract

In this work we present a systematic investigation of various failure mechanisms for thinfilm platinum heater structures and interdigitated electrodes as components of a resistive type soot particle sensor We study the role of stressmigration and electromigration and their interaction for the reliability of these sensors The influence of a titanium adhesion layer and gases from the ambient atmosphere are also studied Lifetime determination and optical and scanning electron microscopy are applied for samples which have experienced different load conditions to understand qualitatively and quantitatively the phenomena The aim of this work is to enable timetofailure prediction and thus provide guidelines for limiting temperature and current density in the actual sensor to ensure its stability over lifetime We use dedicated applicationrelated test structures to ensure that the results are applicable to sensor lifetime estimationsWe are thankful to the microTEC Suedwest Cluster and the German Federal Ministry of Education and Research for funding the joint project between the Robert Bosch Company and the Institute for Applied Materials from KIT Germany under the project number s16SV5126

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