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Title of Journal: Microsyst Technol

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Abbravation: Microsystem Technologies

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Springer Berlin Heidelberg

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DOI

10.1016/0167-2789(94)90278-x

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ISSN

1432-1858

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A novel uncooled thermal imaging sensor using MEMS

Authors: Masoud Pourgholam Bahram Azizollah Ganji
Publish Date: 2017/03/03
Volume: 23, Issue: 10, Pages: 5071-5078
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Abstract

In this paper a new uncooled thermal imaging sensor using MEMS transistor with movable gate is presented The novelty of this work is making moveable polysilicon gate by two minder bimaterials arms on silicon substrate using MEMS technology The arms are deflected with absorbed infrared temperature from objects and move the gate plate By changing air gap between gate and Si channel the drain current of transistor will be changed The geometrical parameters are obtained using analysis of the structure A FEM simulation was performed using COMSOL Multiphysics software to verify the validity This structure has many advantages including compatibility with CMOS fabrication process high sensitivity low power consumption no need signal amplification ability to miniaturization of pixel size much more than other techniques that used until now

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  16. In-situ fabrication of an out-of-plane microlens with pre-definable focal length
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  20. Vibrational energy scavenging with Si technology electromagnetic inertial microgenerators
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