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Title of Journal: Microsyst Technol

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Abbravation: Microsystem Technologies

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Springer-Verlag

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DOI

10.1007/s11663-011-9531-4

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1432-1858

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Fabrication of curved submicron Si structures by

Authors: Hiroshi Tanaka Hirotaka Hida Kazuo Sato
Publish Date: 2012/11/30
Volume: 19, Issue: 7, Pages: 1065-1067
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Abstract

Silicon anisotropic wet etching is applied for fabricating roundshaped microstructures in a size range of submicrons In this work we demonstrate that arbitrary 2D mask patterns having curved profile can be successfully transferred to deepetched cavity profiles on a Si 100 wafer The submicron mask is directly drawn on the Si wafer by irradiating focused ion beam to the wafer surface Anisotropy in etch rate of Si using tetramethyl ammonium hydroxide solution was modified and controlled by adding a surfactant Triton X100 to the solution Etched profile was conformal to etch mask patterns having smooth curvatures

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  2. Micro liquid rotor operated by surface-acoustic-wave
  3. Robust embedding of longitudinal position into tape servo signals
  4. Analysis of PDT noise originating from driving method of a HDD spindle motor
  5. Auto-focusing actuator and camera module including flexible diaphragm for mobile phone camera and wireless capsule endoscope
  6. Novel heat dissipation design for light emitting diode applications
  7. Hot embossing of thermoplastic multilayered stacks
  8. Piezoelectric in-plane microplate resonators based on contour and flexure-actuated modes
  9. A review of fabrication processes for vertical comb drives
  10. Reliability of Pt ohmic contact on an undoped 3C-SiC micro-electrothermal device
  11. Design and fabrication of a square shape bulk mode MEMS resonators
  12. Computational fluid dynamics for effects of coolants on on-chip cooling capability with carbon nanotube micro-fin architectures
  13. Cells adhered and cultured on microcantilevers
  14. Elicitation of a reference process model for tool-based micro technologies for planning and controlling purposes and user support
  15. LTO cartridge reel deflection under tape packing stresses
  16. In-situ fabrication of an out-of-plane microlens with pre-definable focal length
  17. Dynamic calibration method of inertial measurement units
  18. Two temperature theory of initially stressed electro-microstretch medium without energy dissipation
  19. Design of compact and wide bandwidth SPDT with anti-stiction torsional RF MEMS series capacitive switch
  20. Vibrational energy scavenging with Si technology electromagnetic inertial microgenerators
  21. Elastic coefficient analysis on planar S-shaped micro spring under high impact load
  22. Mechanical vibration and critical speeds of rotating composite laminate disks
  23. Enhanced electromigration reliability via Ag nanoparticles modified eutectic Sn–58Bi solder joint
  24. Precise measurement of angular position and speed of spindle motor during spin-up by computing differences in winding current rise time
  25. Motor noise generation and prediction for high spinning speed hard disk drive
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  27. Analysis of electromagnetic interference of a capacitive RF MEMS switch during switching
  28. Ultra fine pitch flat panel display packaging using 3 μm conductive particles
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  32. Analysis and testing of a contraction-and-expansion micromixer for micromilled microfluidics
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