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Title of Journal: Microsyst Technol

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Abbravation: Microsystem Technologies

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Springer-Verlag

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DOI

10.1007/s15005-013-0638-9

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1432-1858

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A review of fabrication processes for vertical com

Authors: Else Gallagher Walied Moussa Mark McDermott
Publish Date: 2012/01/07
Volume: 18, Issue: 4, Pages: 381-397
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Abstract

Twentythree fabrication processes for vertical comb drives are summarized and compared in terms of 1 how they produce the vertical offset between their combs 2 how they electrically isolate their combs from each other 3 what materials they fabricate their combs and springs out of 4 how they achieve horizontal alignment between their opposing teeth 5 whether they can produce comb drives with both actuation and sensing capabilities and additional directions of actuation and 6 whether they trim the thickness of their springs separately from that of their comb teeth and whether they are able to produce an initial vertical overlap between their opposing teeth These comparisons along with brief descriptions of the processes themselves are intended to assist in choosing fabrication processes for vertical comb drive designs or parts of processes from which new ones can be created that are compatible with whichever micromachining facilities are most easily accessibleThe authors would like to thank the National Research Council Canada—National Institute for Nanotechnology the Natural Sciences and Engineering Research Council of Canada the Department of Chemistry at the University of Alberta and Micralyne for funding this work

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  19. Vibrational energy scavenging with Si technology electromagnetic inertial microgenerators
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