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Title of Journal: Microsyst Technol

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Abbravation: Microsystem Technologies

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Springer Berlin Heidelberg

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DOI

10.1016/j.archger.2008.02.009

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1432-1858

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Piezoelectric inplane microplate resonators based

Authors: Tomás Manzaneque V RuizDíez J HernandoGarcía A Ababneh A N AlOmari M Kucera A Bittner U Schmid H Seidel J L SánchezRojas
Publish Date: 2013/12/10
Volume: 20, Issue: 4-5, Pages: 691-699
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Abstract

In this paper we present piezoelectric inplane microresonators designed by two different approaches contour modebased plates in which nearly the whole structure suffers considerable deformation and flexureactuated plates in which a central plate with almost no deformation is moved by lowstiffness flexures that also support it Two separated issues are considered in the analysis the quality factor especially critical when dealing with resonators immersed in liquid and the piezoelectric and elastic characteristics inherent to the geometry of the structure Devices fabricated following both approaches are compared in these terms concluding that contour modebased resonators are more advantageous regarding both the quality factor in liquid and the piezoelastic performance Nevertheless the flexureactuated approach results more adequate when dealing with the design of actuators ie when trying to maximize the ratio of the displacement achieved to the voltage appliedThis work was supported by Spanish Ministerio de Economía y Competitividad project DPI201231203 and the Austrian Research Promotion Agency within the COMETK2 Project XTribology ProjectNo 824187 Tomás Manzaneque and Víctor RuizDíez acknowledge financial support from FPIBES2010030770 and FPUAP20106059 grants Abdallah Ababneh acknowledges financial support from German Research Council DFG under Grant No SE 1425/81

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