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Title of Journal: Microsyst Technol

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Abbravation: Microsystem Technologies

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Springer-Verlag

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DOI

10.1007/bf00984024

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1432-1858

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Analysis of electromagnetic interference of a capa

Authors: XiaoLin Yuan QingAn Huang XiaoPing Liao
Publish Date: 2007/12/12
Volume: 14, Issue: 3, Pages: 349-360
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Abstract

Based on the dynamic model of the membrane bridge for a capacitive RF MEMS switch the switching process may be divided into four stages the charging of the switch capacitor pulldown of the bridge discharging of the switch capacitor and the release of the bridge A model for the electromagnetic field produced in each stage is developed by using Maxwell equations In the charging stage and the discharging stage the value of the magnetic field produced is invariable 6 207 A/m and the electric field increases or decreases linearly But in the pulldown stage the electromagnetic field produced is a pulse field maximum value is 605 A/m In the release stage the magnitude of the electromagnetic field is too small to be considered The electromagnetic field will induce noise on the RF signal in the CPW during switching Finally the electromagnetic field model is verified by numerical simulations The electromagnetic field model and analysis presented here are valuable to optimize the design in order to minimize the electromagnetic interference

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