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Title of Journal: Microsyst Technol

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Abbravation: Microsystem Technologies

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Springer-Verlag

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DOI

10.1007/s10681-011-0369-2

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1432-1858

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Micro liquid rotor operated by surfaceacousticwa

Authors: Tsunemasa Saiki Katsuhide Okada Yuichi Utsumi
Publish Date: 2010/02/18
Volume: 16, Issue: 8-9, Pages: 1589-1594
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Abstract

A micro liquid rotor operated by surface acoustic waves SAWs was proposed and fabricated The liquid rotor has two interdigital transducers IDTs that generate SAWs in order to increase efficiency of rotating the liquid The IDTs were fabricated by patterning Al/Cr on a LiNbO3 substrate Moreover the liquid rotor has a cylindrical liquid pool of 4 mm diameter and 200 μm depth A sidewall of the liquid pool was made of epoxybased negative photoresist on the substrate As characteristics of the liquid rotor we investigated relationships between electric power applied to the IDTs and angular velocity of the liquid or its temperature Through experimentation it was shown that the angular velocity and the temperature increase with increasing the electric power When the fabricated liquid rotor was applied electric power of 2 W the liquid of 5 μL rotated at 330 rad/s 3100 rpm and its temperature reached 65°C

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