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Title of Journal: Microsyst Technol

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Abbravation: Microsystem Technologies

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Springer-Verlag

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DOI

10.1007/s11162-012-9265-4

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1432-1858

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Ellipsometric measurement accuracy of ultrathin lu

Authors: J M Zhao M S Zhang M C Yang R Ji
Publish Date: 2012/05/11
Volume: 18, Issue: 9-10, Pages: 1283-1288
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Abstract

The quantitative analysis of lubricant transferred from disk to slider is important in understanding the interaction in headdisk interface and designing a stable headdisk system When applying ellipsometric technology to determine the lubricant thickness on slider the measurement accuracy is of concern due to the locationtolocation variations of slider optical constants This paper carried out a systematic and quantitative study on how the variations of slider optical constants affect the measurement accuracy of lubricant thickness In this study the distribution of slider optical constant was obtained a differential method was used to calculate the uncertainty in lubricant thickness and the calculated results were experimentally verified The results show that for the stateofart sliders the uncertainty in lubricant thickness is about 20  for below 2 nm thicknesses and less than 15  for around 3 nm thicknesses when measured at 6328 nm wavelength The results of this study might be also useful for the other optical instruments used to determine the amount of the transferred lubricant

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