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Title of Journal: Microsyst Technol

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Abbravation: Microsystem Technologies

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Springer-Verlag

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DOI

10.1016/0378-5173(93)90260-m

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1432-1858

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Hot embossing of thermoplastic multilayered stacks

Authors: A Kolew M Heilig M Schneider K Sikora D Münch M Worgull
Publish Date: 2012/04/22
Volume: 18, Issue: 11, Pages: 1857-1861
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Abstract

The combination of different polymer materials during replication offers additional opportunities for fabrication and functionality of microsystems Different surface and structural properties of polymers allow for improvements in microsystems for example by means of hydrophilic and hydrophobic combinations in microfluidic devices Due to its high flexibility and precision hot embossing as one of the established micro replication processes facilitates processing of several polymer layers in one single process step By this multicomponent process micro structured systems consisting of thin layers of different polymers with adapted surface properties are fabricated In this paper we describe the challenge of molding different types of polymers and some applications for multicomponent micro systemsThe authors acknowledge the partially funding for the presented work by the European Commission within the framework of the FP7 research projects COTECH “Converging technologies for micro systems manufacturing” CPIP 2144912 COTECH and MULTILAYER FP7NMP42007214122 and the support by the European infrastructure project EUMINAfab

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  18. Design of compact and wide bandwidth SPDT with anti-stiction torsional RF MEMS series capacitive switch
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