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Title of Journal: Microsyst Technol

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Abbravation: Microsystem Technologies

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Springer-Verlag

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DOI

10.1016/0041-0101(90)90011-u

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1432-1858

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Embedding conductive patterns of elastomer nanocom

Authors: ChaoXuan Liu JinWoo Choi
Publish Date: 2011/12/15
Volume: 18, Issue: 3, Pages: 365-371
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Abstract

This work introduces a simple and lowcost microfabrication technique utilizing laser ablation to embed conductive elastomer nanocomposite within an insulating bulk elastomer Nanocomposite consisting of polydimethylsiloxane and a network of carbon nanotubes functions as a piezoresistive sensor material Microstructures are embedded with the assist of laser ablation which utilizes a focused laser beam to ablate through a thin polymer film following a path programmed via software This approach eliminates hardware such as photomask or stamp which offers distinct advantages in reducing fabrication time and cost in prototyping of sensor devices Various patterns of polymer film and embedded nanocomposite are demonstrated with spatial resolution down to 34 μm To characterize patterning quality different fabrication conditions are tested and uniformity width thickness data are measured with optical profiling Sensor prototypes are demonstrated based on the piezoresistive response of nanocomposite under tensile strain Strain sensors could detect largerange 45 tensile strain with sensing a factor of about 4 showing promising feasibility for various sensing applications

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