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Title of Journal: Microsyst Technol

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Abbravation: Microsystem Technologies

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Springer-Verlag

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DOI

10.1016/0304-3835(95)03711-5

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1432-1858

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3Dfeaturebased structure design for silicon fabr

Authors: Yang Liu Pingyu Jiang Dinghong Zhang Guanghui Zhou
Publish Date: 2007/01/05
Volume: 13, Issue: 7, Pages: 701-714
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Abstract

To make MEMS structure design in a more intuitive way and to support the “function to 3D shape to mask” design flow a 3D feature based structure design framework and its corresponding key enabling techniques are presented on the basis of inverse design processes and topdown design methodologies Driven by space mapping among function and structure the feature model and its parameters are restricted with the bond graph represented simulation model which is constructed with functional components in simulation library at the systemlevel Conforming design rules the hierarchic feature information model is established and finally can be cascaded down to a group of 3D feature nodes which are all silicon fabrication oriented and defined on the top of CSG/Brep 3D solid models Surrounding this feature information model the 2D mask deducing and fabrication parameters extraction at the fabricationlevel can be performed for manufacturability checking design/fabrication conflict feedback and fabrication process sequence generation Taking a micro gapclosing actuator as an example the structure design process is demonstrated in terms of this 3D feature modeling methodologyThis project is under support of both Natural Science Foundation of China NSFC Grant No 50375118 and 5014006 and the Program for New Century Excellent Talents in University by China Ministry of Education CMOE Grant No NCET040928 The authors hereby thank them for the financial aid

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  1. Position error reduction in magnetic disk drives using a head gimbal assembly with radial head motion capability
  2. Micro liquid rotor operated by surface-acoustic-wave
  3. Robust embedding of longitudinal position into tape servo signals
  4. Analysis of PDT noise originating from driving method of a HDD spindle motor
  5. Auto-focusing actuator and camera module including flexible diaphragm for mobile phone camera and wireless capsule endoscope
  6. Novel heat dissipation design for light emitting diode applications
  7. Hot embossing of thermoplastic multilayered stacks
  8. Piezoelectric in-plane microplate resonators based on contour and flexure-actuated modes
  9. A review of fabrication processes for vertical comb drives
  10. Reliability of Pt ohmic contact on an undoped 3C-SiC micro-electrothermal device
  11. Design and fabrication of a square shape bulk mode MEMS resonators
  12. Computational fluid dynamics for effects of coolants on on-chip cooling capability with carbon nanotube micro-fin architectures
  13. Cells adhered and cultured on microcantilevers
  14. Elicitation of a reference process model for tool-based micro technologies for planning and controlling purposes and user support
  15. LTO cartridge reel deflection under tape packing stresses
  16. In-situ fabrication of an out-of-plane microlens with pre-definable focal length
  17. Dynamic calibration method of inertial measurement units
  18. Two temperature theory of initially stressed electro-microstretch medium without energy dissipation
  19. Design of compact and wide bandwidth SPDT with anti-stiction torsional RF MEMS series capacitive switch
  20. Vibrational energy scavenging with Si technology electromagnetic inertial microgenerators
  21. Elastic coefficient analysis on planar S-shaped micro spring under high impact load
  22. Mechanical vibration and critical speeds of rotating composite laminate disks
  23. Enhanced electromigration reliability via Ag nanoparticles modified eutectic Sn–58Bi solder joint
  24. Precise measurement of angular position and speed of spindle motor during spin-up by computing differences in winding current rise time
  25. Motor noise generation and prediction for high spinning speed hard disk drive
  26. Study on the effect of heating plate thickness on the micro induction heater for thermal bubbles generation
  27. Analysis of electromagnetic interference of a capacitive RF MEMS switch during switching
  28. Ultra fine pitch flat panel display packaging using 3 μm conductive particles
  29. Fabrication of polystyrene microfluidic devices using a pulsed CO 2 laser system
  30. Enhanced efficiency of sorting sperm motility utilizing a microfluidic chip
  31. Bifurcation and chaos analysis of atomic force microscope system
  32. Analysis and testing of a contraction-and-expansion micromixer for micromilled microfluidics
  33. Shield-layers for reducing thermoelastic damping in resonating Silicon bars
  34. Multidimensional line dispensing of unfilled adhesives
  35. Multiple aspect-ratio structural integration in single crystal silicon (MASIS) for fabrication of transmissive MOEMS modulators
  36. Multiple aspect-ratio structural integration in single crystal silicon (MASIS) for fabrication of transmissive MOEMS modulators
  37. Vibration analysis of axially moving magnetic tape with comparisons to static and dynamic experimental results
  38. Flip chip packaging for MEMS microphones
  39. A chip scale nanofluidic pump using electrically controllable hydrophobicity
  40. MEMS switches controlled multi-split ring resonator as a tunable metamaterial component
  41. A study of acoustic noise generating mechanisms of small form factor HDDs
  42. Metallic micro displacement capacitive sensor fabricated by laser micromachining technology
  43. Laser moulding, a new low-cost fabrication process for micro- and nanostructured components
  44. Effect of physical vapor deposition metallic thin films on micro injection molded weld line mechanical properties
  45. Effects of geometric parameters for superhydrophobicity of polymer surfaces fabricated by precision tooling machines
  46. Modelling and evaluation of a thermal microfluidic sensor fabricated on plastic substrate
  47. Readout characteristics of a non-circular aperture mounted on an optical head slider flying above a medium having sub-100-nm-long patterns
  48. Micro injection molding of micro gear using nano-sized zirconia powder
  49. Design and test of a real-time shelf out-of-stock detector system
  50. Iterative design method for an image filter to improve the bit error rate in holographic data storage systems
  51. Impact of oxygen-permeable mold on fabrication of microchannels with ultraviolet curable materials
  52. Numerical investigation of slider dynamics induced by contacts with disk asperities
  53. Ellipsometric measurement accuracy of ultrathin lubricant thickness on magnetic head slider
  54. Depletion of monolayer liquid lubricant films induced by high-frequency pulsed-laser heating in thermally assisted magnetic recording
  55. Design, fabrication and testing of a high performance silicon piezoresistive Z-axis accelerometer with proof mass-edge-aligned-flexures
  56. Analysis of the correlation between acoustic noise and vibration generated by a multi-layer ceramic capacitor
  57. Performance improvement of square microhotplate with insulation layer and heater geometry
  58. A new energy harvester using a cross-ply cylindrical membrane shell integrated with PVDF layers
  59. Fabrication of polymer micro-tip by optical lensing technique
  60. Fabrication of curved sub-micron Si structures by a combination of anisotropic etching using surfactant-added TMAH solution and FIB direct-drawn mask
  61. The MEMS four-leaf clover wideband vibration energy harvesting device: design concept and experimental verification
  62. Method for quick prediction of windage power loss
  63. Reliability characterization of a soot particle sensor in terms of stress- and electromigration in thin-film platinum
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  65. Excitation pulse shape effects in drop test simulation of the actuator arm of a hard disk drive
  66. Embedding conductive patterns of elastomer nanocomposite with the assist of laser ablation
  67. A novel uncooled thermal imaging sensor using MEMS transistor
  68. Effect of suspension design on the non-operational shock response in a load/unload hard disk drive
  69. Dew point and relative humidity measurement using a quartz resonant sensor
  70. RF-MEMS switch actuation pulse optimization using Taguchi’s method
  71. Linear and non-linear behavior of mechanical resonators for optimized inertial electromagnetic microgenerators
  72. Experimental study of slider–lubricant interaction with different slider designs
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