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Title of Journal: Microsyst Technol

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Abbravation: Microsystem Technologies

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Springer-Verlag

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DOI

10.1002/aehe.3640210708

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1432-1858

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Vibrational energy scavenging with Si technology e

Authors: Christophe Serre Alejandro PérezRodríguez Nuria Fondevilla Joan Ramon Morante Josep Montserrat Jaume Esteve
Publish Date: 2007/02/13
Volume: 13, Issue: 11-12, Pages: 1655-1661
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Abstract

In this work we present the design and optimization of an electromagnetic inertial microgenerator for energy scavenging applications compatible with Si technology It consists of a fixed micromachined coil and a movable magnet inertial mass mounted on a resonant structure Kapton® membrane The modeling of the device based on a velocity damped resonator has allowed to make a quantitative analysis of the capabilities of this simple device structure for the development of power generators for autonomous microsystem applications The characterization of a first not optimized prototype has allowed the validation of the model which is then used as a roadmap for a number of optimizations for the final device design For this design the model developed shows the possibility to achieve power levels up to hundreds of μW’s with voltage levels compatible with the requirements of standard rectifying circuits

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Other Papers In This Journal:
  1. Position error reduction in magnetic disk drives using a head gimbal assembly with radial head motion capability
  2. Micro liquid rotor operated by surface-acoustic-wave
  3. Robust embedding of longitudinal position into tape servo signals
  4. Analysis of PDT noise originating from driving method of a HDD spindle motor
  5. Auto-focusing actuator and camera module including flexible diaphragm for mobile phone camera and wireless capsule endoscope
  6. Novel heat dissipation design for light emitting diode applications
  7. Hot embossing of thermoplastic multilayered stacks
  8. Piezoelectric in-plane microplate resonators based on contour and flexure-actuated modes
  9. A review of fabrication processes for vertical comb drives
  10. Reliability of Pt ohmic contact on an undoped 3C-SiC micro-electrothermal device
  11. Design and fabrication of a square shape bulk mode MEMS resonators
  12. Computational fluid dynamics for effects of coolants on on-chip cooling capability with carbon nanotube micro-fin architectures
  13. Cells adhered and cultured on microcantilevers
  14. Elicitation of a reference process model for tool-based micro technologies for planning and controlling purposes and user support
  15. LTO cartridge reel deflection under tape packing stresses
  16. In-situ fabrication of an out-of-plane microlens with pre-definable focal length
  17. Dynamic calibration method of inertial measurement units
  18. Two temperature theory of initially stressed electro-microstretch medium without energy dissipation
  19. Design of compact and wide bandwidth SPDT with anti-stiction torsional RF MEMS series capacitive switch
  20. Elastic coefficient analysis on planar S-shaped micro spring under high impact load
  21. Mechanical vibration and critical speeds of rotating composite laminate disks
  22. Enhanced electromigration reliability via Ag nanoparticles modified eutectic Sn–58Bi solder joint
  23. Precise measurement of angular position and speed of spindle motor during spin-up by computing differences in winding current rise time
  24. Motor noise generation and prediction for high spinning speed hard disk drive
  25. Study on the effect of heating plate thickness on the micro induction heater for thermal bubbles generation
  26. Analysis of electromagnetic interference of a capacitive RF MEMS switch during switching
  27. Ultra fine pitch flat panel display packaging using 3 μm conductive particles
  28. Fabrication of polystyrene microfluidic devices using a pulsed CO 2 laser system
  29. Enhanced efficiency of sorting sperm motility utilizing a microfluidic chip
  30. Bifurcation and chaos analysis of atomic force microscope system
  31. Analysis and testing of a contraction-and-expansion micromixer for micromilled microfluidics
  32. Shield-layers for reducing thermoelastic damping in resonating Silicon bars
  33. Multidimensional line dispensing of unfilled adhesives
  34. Multiple aspect-ratio structural integration in single crystal silicon (MASIS) for fabrication of transmissive MOEMS modulators
  35. Multiple aspect-ratio structural integration in single crystal silicon (MASIS) for fabrication of transmissive MOEMS modulators
  36. Vibration analysis of axially moving magnetic tape with comparisons to static and dynamic experimental results
  37. Flip chip packaging for MEMS microphones
  38. A chip scale nanofluidic pump using electrically controllable hydrophobicity
  39. MEMS switches controlled multi-split ring resonator as a tunable metamaterial component
  40. A study of acoustic noise generating mechanisms of small form factor HDDs
  41. Metallic micro displacement capacitive sensor fabricated by laser micromachining technology
  42. Laser moulding, a new low-cost fabrication process for micro- and nanostructured components
  43. Effect of physical vapor deposition metallic thin films on micro injection molded weld line mechanical properties
  44. Effects of geometric parameters for superhydrophobicity of polymer surfaces fabricated by precision tooling machines
  45. Modelling and evaluation of a thermal microfluidic sensor fabricated on plastic substrate
  46. Readout characteristics of a non-circular aperture mounted on an optical head slider flying above a medium having sub-100-nm-long patterns
  47. Micro injection molding of micro gear using nano-sized zirconia powder
  48. Design and test of a real-time shelf out-of-stock detector system
  49. Iterative design method for an image filter to improve the bit error rate in holographic data storage systems
  50. Impact of oxygen-permeable mold on fabrication of microchannels with ultraviolet curable materials
  51. Numerical investigation of slider dynamics induced by contacts with disk asperities
  52. Ellipsometric measurement accuracy of ultrathin lubricant thickness on magnetic head slider
  53. 3D-feature-based structure design for silicon fabrication of micro devices
  54. Depletion of monolayer liquid lubricant films induced by high-frequency pulsed-laser heating in thermally assisted magnetic recording
  55. Design, fabrication and testing of a high performance silicon piezoresistive Z-axis accelerometer with proof mass-edge-aligned-flexures
  56. Analysis of the correlation between acoustic noise and vibration generated by a multi-layer ceramic capacitor
  57. Performance improvement of square microhotplate with insulation layer and heater geometry
  58. A new energy harvester using a cross-ply cylindrical membrane shell integrated with PVDF layers
  59. Fabrication of polymer micro-tip by optical lensing technique
  60. Fabrication of curved sub-micron Si structures by a combination of anisotropic etching using surfactant-added TMAH solution and FIB direct-drawn mask
  61. The MEMS four-leaf clover wideband vibration energy harvesting device: design concept and experimental verification
  62. Method for quick prediction of windage power loss
  63. Reliability characterization of a soot particle sensor in terms of stress- and electromigration in thin-film platinum
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  66. Embedding conductive patterns of elastomer nanocomposite with the assist of laser ablation
  67. A novel uncooled thermal imaging sensor using MEMS transistor
  68. Effect of suspension design on the non-operational shock response in a load/unload hard disk drive
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  70. RF-MEMS switch actuation pulse optimization using Taguchi’s method
  71. Linear and non-linear behavior of mechanical resonators for optimized inertial electromagnetic microgenerators
  72. Experimental study of slider–lubricant interaction with different slider designs
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