Paper Search Console

Home Search Page About Contact

Journal Title

Title of Journal: Microsyst Technol

Search In Journal Title:

Abbravation: Microsystem Technologies

Search In Journal Abbravation:

Publisher

Springer Berlin Heidelberg

Search In Publisher:

DOI

10.1007/bf00490271

Search In DOI:

ISSN

1432-1858

Search In ISSN:
Search In Title Of Papers:

Design and fabrication of a square shape bulk mode

Authors: Mohammad Hossein Zarifi Mojgan Daneshmand
Publish Date: 2014/10/19
Volume: 21, Issue: 11, Pages: 2455-2462
PDF Link

Abstract

This paper reports the design simulation and fabrication of a micromechanical square shape resonators fabricated in single crystal silicon using a silicon on isolator wafer Two different types of excitation for square shape resonators were used to stimulate Lame mode and square mode of resonance The fabricated devices were studied under different bias voltage and in air at room temperature The highest quality factor measured for the Lame mode resonator was 11121 and for the square mode was 9120 for square mode at 317 and 401 MHz under the 80 V DC bias voltage across 15 μm actuation gap It has been shown that by adding raggedy edge the coupling capacitor has increased Mass detection capabilities of these resonators were also investigated by adding an extra layer of gold Frequency and quality factor variation was observed for each of the fabricated resonators Adding a mass of 76 pgr leads to resonance frequency shift of 31 kHz in Lame mode structure In this experiment quality factor drop was observed because of continues film layer of gold metal with a thickness of 100 nm

Keywords:

References

.
Search In Abstract Of Papers:
Other Papers In This Journal:
  1. Position error reduction in magnetic disk drives using a head gimbal assembly with radial head motion capability
  2. Micro liquid rotor operated by surface-acoustic-wave
  3. Robust embedding of longitudinal position into tape servo signals
  4. Analysis of PDT noise originating from driving method of a HDD spindle motor
  5. Auto-focusing actuator and camera module including flexible diaphragm for mobile phone camera and wireless capsule endoscope
  6. Novel heat dissipation design for light emitting diode applications
  7. Hot embossing of thermoplastic multilayered stacks
  8. Piezoelectric in-plane microplate resonators based on contour and flexure-actuated modes
  9. A review of fabrication processes for vertical comb drives
  10. Reliability of Pt ohmic contact on an undoped 3C-SiC micro-electrothermal device
  11. Computational fluid dynamics for effects of coolants on on-chip cooling capability with carbon nanotube micro-fin architectures
  12. Cells adhered and cultured on microcantilevers
  13. Elicitation of a reference process model for tool-based micro technologies for planning and controlling purposes and user support
  14. LTO cartridge reel deflection under tape packing stresses
  15. In-situ fabrication of an out-of-plane microlens with pre-definable focal length
  16. Dynamic calibration method of inertial measurement units
  17. Two temperature theory of initially stressed electro-microstretch medium without energy dissipation
  18. Design of compact and wide bandwidth SPDT with anti-stiction torsional RF MEMS series capacitive switch
  19. Vibrational energy scavenging with Si technology electromagnetic inertial microgenerators
  20. Elastic coefficient analysis on planar S-shaped micro spring under high impact load
  21. Mechanical vibration and critical speeds of rotating composite laminate disks
  22. Enhanced electromigration reliability via Ag nanoparticles modified eutectic Sn–58Bi solder joint
  23. Precise measurement of angular position and speed of spindle motor during spin-up by computing differences in winding current rise time
  24. Motor noise generation and prediction for high spinning speed hard disk drive
  25. Study on the effect of heating plate thickness on the micro induction heater for thermal bubbles generation
  26. Analysis of electromagnetic interference of a capacitive RF MEMS switch during switching
  27. Ultra fine pitch flat panel display packaging using 3 μm conductive particles
  28. Fabrication of polystyrene microfluidic devices using a pulsed CO 2 laser system
  29. Enhanced efficiency of sorting sperm motility utilizing a microfluidic chip
  30. Bifurcation and chaos analysis of atomic force microscope system
  31. Analysis and testing of a contraction-and-expansion micromixer for micromilled microfluidics
  32. Shield-layers for reducing thermoelastic damping in resonating Silicon bars
  33. Multidimensional line dispensing of unfilled adhesives
  34. Multiple aspect-ratio structural integration in single crystal silicon (MASIS) for fabrication of transmissive MOEMS modulators
  35. Multiple aspect-ratio structural integration in single crystal silicon (MASIS) for fabrication of transmissive MOEMS modulators
  36. Vibration analysis of axially moving magnetic tape with comparisons to static and dynamic experimental results
  37. Flip chip packaging for MEMS microphones
  38. A chip scale nanofluidic pump using electrically controllable hydrophobicity
  39. MEMS switches controlled multi-split ring resonator as a tunable metamaterial component
  40. A study of acoustic noise generating mechanisms of small form factor HDDs
  41. Metallic micro displacement capacitive sensor fabricated by laser micromachining technology
  42. Laser moulding, a new low-cost fabrication process for micro- and nanostructured components
  43. Effect of physical vapor deposition metallic thin films on micro injection molded weld line mechanical properties
  44. Effects of geometric parameters for superhydrophobicity of polymer surfaces fabricated by precision tooling machines
  45. Modelling and evaluation of a thermal microfluidic sensor fabricated on plastic substrate
  46. Readout characteristics of a non-circular aperture mounted on an optical head slider flying above a medium having sub-100-nm-long patterns
  47. Micro injection molding of micro gear using nano-sized zirconia powder
  48. Design and test of a real-time shelf out-of-stock detector system
  49. Iterative design method for an image filter to improve the bit error rate in holographic data storage systems
  50. Impact of oxygen-permeable mold on fabrication of microchannels with ultraviolet curable materials
  51. Numerical investigation of slider dynamics induced by contacts with disk asperities
  52. Ellipsometric measurement accuracy of ultrathin lubricant thickness on magnetic head slider
  53. 3D-feature-based structure design for silicon fabrication of micro devices
  54. Depletion of monolayer liquid lubricant films induced by high-frequency pulsed-laser heating in thermally assisted magnetic recording
  55. Design, fabrication and testing of a high performance silicon piezoresistive Z-axis accelerometer with proof mass-edge-aligned-flexures
  56. Analysis of the correlation between acoustic noise and vibration generated by a multi-layer ceramic capacitor
  57. Performance improvement of square microhotplate with insulation layer and heater geometry
  58. A new energy harvester using a cross-ply cylindrical membrane shell integrated with PVDF layers
  59. Fabrication of polymer micro-tip by optical lensing technique
  60. Fabrication of curved sub-micron Si structures by a combination of anisotropic etching using surfactant-added TMAH solution and FIB direct-drawn mask
  61. The MEMS four-leaf clover wideband vibration energy harvesting device: design concept and experimental verification
  62. Method for quick prediction of windage power loss
  63. Reliability characterization of a soot particle sensor in terms of stress- and electromigration in thin-film platinum
  64. A directly stackable microsystem onto the cultured cells for cytotoxicity tests
  65. Excitation pulse shape effects in drop test simulation of the actuator arm of a hard disk drive
  66. Embedding conductive patterns of elastomer nanocomposite with the assist of laser ablation
  67. A novel uncooled thermal imaging sensor using MEMS transistor
  68. Effect of suspension design on the non-operational shock response in a load/unload hard disk drive
  69. Dew point and relative humidity measurement using a quartz resonant sensor
  70. RF-MEMS switch actuation pulse optimization using Taguchi’s method
  71. Linear and non-linear behavior of mechanical resonators for optimized inertial electromagnetic microgenerators
  72. Experimental study of slider–lubricant interaction with different slider designs
Search Result: