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Title of Journal: Microsyst Technol

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Abbravation: Microsystem Technologies

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Springer Berlin Heidelberg

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DOI

10.1016/0002-9378(92)91373-I

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ISSN

1432-1858

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Bifurcation and chaos analysis of atomic force mic

Authors: ChengChi Wang ChungNeng Huang HerTerng Yau ShinXiang Hsu
Publish Date: 2013/05/03
Volume: 19, Issue: 11, Pages: 1795-1805
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Abstract

Atomic force microscope AFM is a very highresolution type of scanning probe microscope which is an essential characterization and actuation tool in modern nanoscience or engineering This paper investigates the bifurcation and chaos behavior of the probe tip from AFM system by the differential transformation method DTM The dynamic behavior of the probe tip is characterized by reference to bifurcation diagrams phase portraits power spectra Poincaré maps and maximum Lyapunov exponent plots produced using the timeseries data obtained from DTM The results indicate that the probe tip behavior is significantly dependent on the magnitude of the vibrational amplitude Specifically the probe tip motion changes from Tperiodic to 3Tperiodic then from 2Tperiodic to multiperiodic and finally to chaotic motion with windows of periodic motion as the vibrational amplitude is increased from 0 to 20 Furthermore it is demonstrated that the DTM is in good agreement for the considered system

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