Authors: Peng Yuan Yang Stevan Stankovic Jasna Crnjanski Ee Jin Teo David Thomson Andrew A Bettiol Mark B H Breese William Headley Cristina Giusca Graham T Reed Goran Z Mashanovich
Publish Date: 2007/12/04
Volume: 20, Issue: 1, Pages: 159-163
Abstract
Silicon photonics is experiencing a dramatic increase in interest due to emerging application areas and several high profile successes in device and technology development Liu et al Nature 427615 2004 Rong et al Nature 433725 2005 Almeida et al Nature 4311081 2004 Conventional waveguides in silicon photonics are designed for the telecom wavelengths However mid and longwave infrared regions are interesting for several application areas including sensing communications signal processing missile detection and imaging Soref et al J Opt A Pure Appl Opt 8840 2006 The most popular waveguide platform in silicon photonics is the SiliconOnInsulator SOI structure in the form of either a strip or a rib waveguide This material structure however is not suitable for longer wavelengths except in the 29–36 μm range due to the absorption spectra of silicon dioxide Soref et al J Opt A Pure Appl Opt 8840 2006 In this paper we discuss the design and fabrication of two different waveguide structures the freestanding Yang et al Appl Phys Lett 90241109 2007 and hollow core waveguides Stanković et al Proceedings of 51th Conference ETRAN 2007 The former is suitable for longwave infrared applications as it has an air cladding whilst the latter is a candidate for sensing in the midwave infrared wavelength region
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