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Title of Journal: Journal of Elec Materi

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Abbravation: Journal of Electronic Materials

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Springer US

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DOI

10.1016/0928-4680(94)90469-3

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1543-186X

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Preventing Electrical Shorts in ParallelPlate Cap

Authors: Maša Horvat Tjaša Vidmar Marijan Maček Marta Klanjšek Gunde
Publish Date: 2015/05/12
Volume: 44, Issue: 7, Pages: 2488-2496
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Abstract

Doubleprinting of dielectric layers is commonly used to prevent electrical shorts in parallelplate capacitors but this increases the thickness of the dielectric layer and diminishes the corresponding capacitance Doubleprinting also complicates the production process and increases production costs In this paper it is demonstrated that capacitors with singleprinted dielectric layers are without shorts if the layer is completely polymerized Therefore electrical shorts could also be related to the state of polymerization in a defectfree dielectric layer To demonstrate this the electrical functionality of capacitors with singleprinted dielectric layers was studied in terms of intrinsic properties of the ultraviolet UV curable dielectric layer which were varied according to the curing energy The chemical structure of the cured layer was analyzed with infrared spectroscopy to obtain the appearance of polymerizable groups and crosslinks within the polymer structure Differential scanning calorimetry was used to measure the glass transition temperature of the dielectric material It increases rapidly with UV curing until the polymerization is completed whereas a small increase with further curing confirms crosslinking of the polymer The influence of structuring effects within a dielectric layer in the presence of electrical shorts between electrodes is discussed This research confirms that a completely polymerized layer forms a barrier to leakage and helps to prevent the formation of conductive paths between electrodes Therefore a connection between the structure of polymerized layer and its electrical properties is highly reasonable


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