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Title of Journal: Appl Phys A

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Abbravation: Applied Physics A

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Springer Berlin Heidelberg

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DOI

10.1007/bf01113602

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ISSN

1432-0630

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KrF excimer laser processing of thick diamondlike

Authors: R Danyi T Szörényi
Publish Date: 2004/09/01
Volume: 79, Issue: 4-6, Pages: 1373-1376
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Abstract

Ablation characteristics of a commercially available diamondlike carbon DLC film the EVERSCANTM bar code scanner window Diamonex Division of Morgan Advanced Ceramics Inc in the 0–7 J cm2 fluence window are reported Glass pieces covered with 6 μm thick DLC coating are ablated by 22 ns pulses of a KrF excimer laser in medium vacuum 101 Pa and in Ar and O2 atmospheres of 105 Pa The ablation depth increases strictly linearly with an increasing number of pulses independently of the atmosphere and the applied fluence The threshold lies at 013 J cm2 and is independent of the atmosphere While above 1 J cm2 the ablation rate vs fluence plots recorded in different atmospheres coincide within experimental error processing under vacuum between 05 and 1 J cm2 results in significantly higher ablation rate values Ablation rates exceeding 100 nm/pulse above 1 J cm2 ensure extremely efficient machining over extended areas even at relatively low fluences Identical characteristics in Ar and O2 atmospheres suggest that solely physical ablative processes contribute to material removal

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