Authors: S U Jen Y T Chen N T Yang W C Cheng
Publish Date: 2008/08/13
Volume: 94, Issue: 2, Pages: 431-436
Abstract
Permalloy Py films were deposited on Si111 or Corning 0211 glass substrates There were two deposition temperatures T s=room temperature RT and T s=270°C The film thickness t f ranges from 10 to 130 nm The crystal structure properties of the films were studied by Xray diffraction and transmission electron microscopy Mechanical properties including Young’s modulus E f and hardness H f of each film were measured by the nanoindentation NI technique E f of the Py/Si111 films was checked again by the laser induced surface acoustic wave LASAW technique It was found that the NI technique is best suited for the measurements of E f and H f but only when the sample belongs to the soft film/soft substrate system such as the Py/glass film For the soft film/hard substrate system such as the Py/Si111 film the NI technique often provides higher values of E f and H f than expected The anomalous phenomenon associated with the NI technique may be related to the anisotropic crystal structures in the Py films on different kinds of substrates From this study we conclude that E f of Py/Si111E f of Py/glass and H f of Py/Si111H f of Py/glass The good mechanical properties of the Py/Si111 film make it a better candidate for recording head applications
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