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Title of Journal: Appl Phys A

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Abbravation: Applied Physics A

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Springer-Verlag

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DOI

10.1002/chin.198713026

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1432-0630

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Physical and electrical characteristics of BaZrS

Authors: ChengFu Yang KaiHuang Chen YingChung Chen TingChang Chang
Publish Date: 2007/09/25
Volume: 90, Issue: 2, Pages: 329-331
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Abstract

In this study the effects of oxygen gas plasma treatment on the surface of BaZr01Ti09O3 BZT films are investigated The influence of oxygen plasma treatment on the crystal structure is developed by Xray diffraction patterns and on the electrical characteristics are measured by the Al/BZT/Pt capacitor metal–dielectric–metal structure Experimental results show that the capacitance increases and the leakage current density decreases as the oxygen plasma is treated on the BZT films These results clearly indicate that the electrical characteristics of BZT films have effectively improved by means of the oxygen plasma surface treatment process

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