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Title of Journal: Appl Phys A

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Abbravation: Applied Physics A

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Springer-Verlag

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DOI

10.1007/bf02066493

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1432-0630

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Subsurface defect of amorphous carbon film imaged

Authors: JT Zeng KY Zhao HR Zeng HZ Song LY Zheng GR Li QR Yin
Publish Date: 2008/02/14
Volume: 91, Issue: 2, Pages: 261-265
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Abstract

Amorphous carbon films were examined by low frequency scanningprobe acoustic microscopy LFSPAM Local elastic properties as well as topography were imaged in the acoustic mode Two kinds of subsurface defects were revealed by the LFSPAM method The influence of the subsurface defects on the elastic properties was also discussed The ability to image subsurface defects was dependent on the scan area and the scan speed Our results showed that the low frequency scanningprobe acoustic microscopy is a useful method for imaging subsurface defects with high resolution

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