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Title of Journal: Anal Bioanal Chem

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Abbravation: Analytical and Bioanalytical Chemistry

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Springer-Verlag

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DOI

10.1016/j.annfar.2013.01.013

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1618-2650

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Characterizing single crystal surfaces using high

Authors: D Thien FJ Meyer zu Heringdorf P Kury M Hornvon Hoegen
Publish Date: 2004/03/03
Volume: 379, Issue: 4, Pages: 588-593
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Abstract

Characterization and controlled manipulation of surfaces is a crucial factor in modern processing of the technologically relevant Si100 surface Using spot profile analyzing low energy electron diffraction the morphological changes from a single stepped vicinal Si100 surface to a singledomain 2×1 reconstructed surface have been investigated in situ during Si deposition The temperature range for formation of this kineticallystabilized singledomain surface was found to be 400–500 °C This singledomain surface could be preserved for further characterization and experiments after quenching to room temperature

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