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Title of Journal: Anal Bioanal Chem

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Abbravation: Analytical and Bioanalytical Chemistry

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Springer-Verlag

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DOI

10.1016/0042-207x(66)90633-6

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1618-2650

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Characterization of nonstoichiometric cosputtere

Authors: F Stemme H Geßwein M D Drahus B Holländer C Azucena J R Binder RA Eichel J Haußelt M Bruns
Publish Date: 2011/10/20
Volume: 403, Issue: 3, Pages: 643-650
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Abstract

The fabrication of novel irondoped barium strontium titanate thin films by means of radio frequency RF magnetron cosputtering is shown Investigations of the elemental composition and the dopant distribution in the thin films obtained by Xray photoelectron spectroscopy Rutherford backscattering spectrometry and timeofflight secondary ion mass spectroscopy reveal a homogeneous dopant concentration throughout the thin film The incorporation of the iron dopant and the temperaturedependent evolution of the crystal structure and morphology are analyzed by electron paramagnetic resonance spectroscopy Xray diffraction Raman spectroscopy atomic force microscopy and scanning electron microscopy In summary these results emphasize the RF magnetron cosputter process as a versatile way to fabricate doped thin filmsThe authors gratefully acknowledge Mrs V Hermann and Mr U Geckle KIT for the assistance during the experimental work and like to thank Dr H H Belz ThermoFisher Scientific GmbH Dreieich Germany for the Raman measurements as well as Dr Peter Jakes for experimental support and many helpful discussions

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